CPEM 2004
Conference on Precision Electromagnetic Measurements

Friday

First Plenary Session

"Applications of Microsystems in precision measurements"
H. Seppä

Micro Electro Mechanical System (MEMS) is a new potential technology to fabricate DC and AC voltage references, AC/DC converters, and high frequency power sensors. In addition, MEMS is very suitable technology for stable reference oscillators. The stability of the components is based on single crystal silicon springs, stress free substrate material (SOI) and metallized surfaces on both capacitor surfaces defining the geometry. The system is either vacuum encapsulated or in protective atmosphere depending on the application. AC and DC voltage references are based on the pull-in voltage, which characterizes a moving plate capacitive MEMS component. An AC/DC converter and a high frequency power sensor utilizes a seesaw structure, which is kept in balance by force feedback. The force is directly proportional to the RMS value of the AC and DC signals. We have also studied the work functions of different metals on silicon to improve the sensor long-term stability. In this paper our new Silicon on Insulator (SOI) manufacturing process, specially developed for electrical references, will be described. In addition, our recent results will be discussed. The stability and resolution of these new references are compared to existing components such as Zener diodes, thermocouples and rf diodes.

"Results of Foresight project and implications for technology"
W. Stewart

'The Foresight Project 'Exploiting the Electromagnetic Spectrum' has reviewed the applications that look most likely to give rise to major innovations (science-to-exploitation) over the next 10-20 years, covering the whole spectrum from RF to X-ray, including TeraHertz, infrared and visible. This talk will describe the results of this study, the applications and technologies considered most promising and will then review the implications for measurement needs and technology